Inventor

KOSHY Robin

US3 patents

Patents

3 patents

US11087961B2Aug 10, 2021

Quartz component with protective coating

LAM RES CORP0 citations58

US12249490B2Mar 11, 2025

Single crystal metal oxide plasma chamber component

LAM RES CORP0 citations55

US9947558B2Apr 17, 2018

Method for conditioning silicon part

LAM RES CORP0 citations49