Inventor
BOMBEECK JOHN MARIA
NL4 patents
Patents
4 patentsUS12242200B2Mar 4, 2025
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations59
US11774857B2Oct 3, 2023
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11372336B2Jun 28, 2022
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US10534271B2Jan 14, 2020
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations34