Inventor
MELMAN JOHANNES CORNELIS PAULUS
NL10 patents
Patents
10 patentsUS10416571B2Sep 17, 2019
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV4 citations82
US11231653B2Jan 25, 2022
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US10969695B2Apr 6, 2021
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US11614689B2Mar 28, 2023
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US12242200B2Mar 4, 2025
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations59
US11774857B2Oct 3, 2023
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11372336B2Jun 28, 2022
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US10317804B2Jun 11, 2019
Substrate table, lithographic apparatus and method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10627721B2Apr 21, 2020
Lithography apparatus, and a method of manufacturing a device
ASML NETHERLANDS BV0 citations36
US10534271B2Jan 14, 2020
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations34