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Inventor
BARUCH MOSHE
IL
3 patents
⚠️ This page may combine multiple inventors who share the name “BARUCH MOSHE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MANASSEN AMNON
2 patents
US9164397B2
Oct 20, 2015
Optics symmetrization for metrology
MANASSEN AMNON
7 citations
83
US8582114B2
Nov 12, 2013
Overlay metrology by pupil phase analysis
MANASSEN AMNON
7 citations
82
KLA TENCOR TECH CORP
1 patent
US7242477B2
Jul 10, 2007
Apparatus and methods for detecting overlay errors using scatterometry
KLA TENCOR TECH CORP
124 citations
98