Inventor

OHSE TAKESHI

JP8 patents

⚠️ This page may combine multiple inventors who share the name “OHSE TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US8703002B2Apr 22, 2014

Plasma processing apparatus, plasma processing method and storage medium

TOKYO ELECTRON LTD343 citations98

US9564287B2Feb 7, 2017

Substrate processing apparatus and substrate processing method using same

TOKYO ELECTRON LTD41 citations94

US10032611B2Jul 24, 2018

Connection control method

TOKYO ELECTRON LTD1 citations52

TOSHIBA KK

1 patent

US10388544B2Aug 20, 2019

Substrate processing apparatus and substrate processing method

TOSHIBA KK45 citations93

UI AKIO

1 patent

US8821684B2Sep 2, 2014

Substrate plasma processing apparatus and plasma processing method

UI AKIO52 citations92

OHSE TAKESHI

1 patent

US8568606B2Oct 29, 2013

Substrate processing apparatus and substrate processing method using same

OHSE TAKESHI37 citations91

IIZUKA HACHISHIRO

1 patent

US8852387B2Oct 7, 2014

Plasma processing apparatus and shower head

IIZUKA HACHISHIRO6 citations72

HAYAMI TOSHIHIRO

1 patent

US8286581B2Oct 16, 2012

High frequency power source and its control method, and plasma processing apparatus

HAYAMI TOSHIHIRO5 citations57