Inventor

REILLY PATRICK JAMES

US2 patents

Patents

2 patents

US9748093B2Aug 29, 2017

Pulsed nitride encapsulation

APPLIED MATERIALS INC1 citations42

US9646818B2May 9, 2017

Method of forming planar carbon layer by applying plasma power to a combination of hydrocarbon precursor and hydrogen-containing precursor

APPLIED MATERIALS INC0 citations28