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Inventor
BETHKE DAVID ALAN
US
2 patents
Patents
2 patents
US9748093B2
Aug 29, 2017
Pulsed nitride encapsulation
APPLIED MATERIALS INC
1 citations
42
US9646818B2
May 9, 2017
Method of forming planar carbon layer by applying plasma power to a combination of hydrocarbon precursor and hydrogen-containing precursor
APPLIED MATERIALS INC
0 citations
28