Inventor
NAKAYA MICHIKO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “NAKAYA MICHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS7527016B2May 5, 2009
Plasma processing apparatus
TOKYO ELECTRON LTD16 citations82
US11699614B2Jul 11, 2023
Film deposition method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations72
US10651044B2May 12, 2020
Processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations72
US11804379B2Oct 31, 2023
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US12071687B2Aug 27, 2024
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US11459655B2Oct 4, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US7902078B2Mar 8, 2011
Processing method and plasma etching method
TOKYO ELECTRON LTD5 citations61
US12080521B2Sep 3, 2024
Plasma processing method
TOKYO ELECTRON LTD0 citations59
US11749508B2Sep 5, 2023
Plasma processing method
TOKYO ELECTRON LTD0 citations59
US10886138B2Jan 5, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations57
US11728176B2Aug 15, 2023
Treatment method
TOKYO ELECTRON LTD0 citations50
US10504741B2Dec 10, 2019
Semiconductor manufacturing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations41