Inventor
KAMATA EIKI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “KAMATA EIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
20 patentsUS12243718B2Mar 4, 2025
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations74
US12412732B2Sep 9, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US11967485B2Apr 23, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations62
US11600475B2Mar 7, 2023
Plasma processing apparatus and control method
TOKYO ELECTRON LTD0 citations62
US11476088B2Oct 18, 2022
Array antenna and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US11410835B2Aug 9, 2022
Plasma density monitor, plasma processing apparatus, and plasma processing method
TOKYO ELECTRON LTD1 citations62
US11355326B2Jun 7, 2022
Plasma processing apparatus and control method
TOKYO ELECTRON LTD0 citations62
US12315700B2May 27, 2025
Plasma processing apparatus and ceiling wall
TOKYO ELECTRON LTD0 citations58
US12338532B2Jun 24, 2025
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11887825B2Jan 30, 2024
Control method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11721528B2Aug 8, 2023
Plasma processing apparatus and control method
TOKYO ELECTRON LTD0 citations52
US12407078B2Sep 2, 2025
Tuner, and impedance matching method
TOKYO ELECTRON LTD0 citations51
US12237157B2Feb 25, 2025
Plasma measurement method
TOKYO ELECTRON LTD0 citations51
US12046453B2Jul 23, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US11784085B2Oct 10, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US12444574B2Oct 14, 2025
Plasma processing apparatus, and plasma processing method
TOKYO ELECTRON LTD0 citations50
US12165846B2Dec 10, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations50
US11842886B2Dec 12, 2023
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US11164730B2Nov 2, 2021
Plasma probe device and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US12283465B2Apr 22, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations47