Inventor

COOGANS MARTYN JOHN

NL6 patents

⚠️ This page may combine multiple inventors who share the name “COOGANS MARTYN JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US10295913B2May 21, 2019

Inspection method and apparatus, and corresponding lithographic apparatus

ASML NETHERLANDS BV5 citations66

US9594311B2Mar 14, 2017

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

ASML NETHERLANDS BV1 citations62

US9594310B2Mar 14, 2017

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

ASML NETHERLANDS BV0 citations51

VAN DE KERKHOF MARCUS ADRIANUS

1 patent

US8786825B2Jul 22, 2014

Apparatus and method of measuring a property of a substrate

VAN DE KERKHOF MARCUS ADRIANUS30 citations92

DEN BOEF ARIE JEFFREY

1 patent

US8908147B2Dec 9, 2014

Method and apparatus for determining an overlay error

DEN BOEF ARIE JEFFREY9 citations81

VAN DER SCHAAR MAURITS

1 patent

US9235141B2Jan 12, 2016

Inspection apparatus and method for measuring a property of a substrate

VAN DER SCHAAR MAURITS2 citations62