Inventor
CHANG YA-HUEI
HK7 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YA-HUEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CORNING INC
3 patentsUS11328950B2May 10, 2022
Thin glass or ceramic substrate for silicon-on-insulator technology
CORNING INC0 citations60
US12507593B2Dec 23, 2025
Substrate thinning process using temporary bond with low thickness variation
CORNING INC0 citations56
US11948792B2Apr 2, 2024
Glass wafers for semiconductor device fabrication
CORNING INC0 citations50