Inventor

MOREAU OLIVIER

US2 patents

Patents

2 patents

US9947596B2Apr 17, 2018

Range-based real-time scanning electron microscope non-visual binner

KLA TENCOR CORP0 citations42

US10062543B2Aug 28, 2018

Determining multi-patterning step overlay error

KLA TENCOR CORP0 citations31