Inventor
WANG XIAN BIN
SG3 patents
Patents
3 patentsUS6649486B1Nov 18, 2003
Method to form shallow trench isolations
CHARTERED SEMICONDUCTOR MFG11 citations71
US6569770B2May 27, 2003
Method for improving oxide erosion of tungsten CMP operations
CHARTERED SEMICONDUCTOR MFG8 citations70
US7276440B2Oct 2, 2007
Method of fabrication of a die oxide ring
CHARTERED SEMICONDUCTOR MFG2 citations61