Inventor
LEE PAOHUEI
US3 patents
Patents
3 patentsUS7440091B2Oct 21, 2008
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC16 citations89
US7834994B2Nov 16, 2010
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC2 citations60
US7587812B2Sep 15, 2009
Electronic device manufacturing component with an embedded chip and methods of using the same
APPLIED MATERIALS INC0 citations48