Inventor

KIM SAM-KYUNG

KR2 patents

Patents

2 patents

US7440091B2Oct 21, 2008

Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate

APPLIED MATERIALS INC16 citations89

US7834994B2Nov 16, 2010

Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate

APPLIED MATERIALS INC2 citations60