Inventor
KANG MIN-SUB
KR4 patents
Patents
4 patentsUS6440760B1Aug 27, 2002
Method of measuring etched state of semiconductor wafer using optical impedence measurement
SAMSUNG ELECTRONICS CO LTD67 citations92
US7091485B2Aug 15, 2006
Methods and systems for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles
SAMSUNG ELECTRONICS CO LTD6 citations72
US7468512B2Dec 23, 2008
Computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles
SAMSUNG ELECTRONICS CO LTD1 citations61
US7923684B2Apr 12, 2011
Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles
SAMSUNG ELECTRONICS CO LTD0 citations51