Inventor
NAKATANI IKUYOSHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “NAKATANI IKUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
5 patentsUS5233291AAug 3, 1993
Method of and apparatus for measuring electric characteristics of semiconductor wafer
DAINIPPON SCREEN MFG59 citations94
US4803948AFeb 14, 1989
Heat processing apparatus for semiconductor manufacturing
DAINIPPON SCREEN MFG38 citations92
US5568252AOct 22, 1996
Method and apparatus for measuring insulation film thickness of semiconductor wafer
DAINIPPON SCREEN MFG30 citations91
US5239183AAug 24, 1993
Optical gap measuring device using frustrated internal reflection
DAINIPPON SCREEN MFG28 citations91
US5225690AJul 6, 1993
Gap measuring device and method using frustrated internal reflection
DAINIPPON SCREEN MFG25 citations91