Inventor
MIYAZAKI TAKANORI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “MIYAZAKI TAKANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS6589338B1Jul 8, 2003
Device for processing substrate
TOKYO ELECTRON LTD110 citations97
US5370142ADec 6, 1994
Substrate washing device
TOKYO ELECTRON LTD99 citations95
US6115867ASep 12, 2000
Apparatus for cleaning both sides of substrate
TOKYO ELECTRON LTD68 citations94
US6827814B2Dec 7, 2004
Processing apparatus, processing system and processing method
TOKYO ELECTRON LTD45 citations92
US6292972B1Sep 25, 2001
Scrub washing apparatus and scrub washing method
TOKYO ELECTRON LTD17 citations92
US5431179AJul 11, 1995
Wafer drying apparatus and fire-extinguishing method therefor
TOKYO ELECTRON LTD21 citations91
US5299584AApr 5, 1994
Cleaning device
TOKYO ELECTRON LTD59 citations91
US6554010B1Apr 29, 2003
Substrate cleaning tool, having permeable cleaning head
TOKYO ELECTRON LTD23 citations90
US6178580B1Jan 30, 2001
Processing apparatus
TOKYO ELECTRON LTD17 citations82
US5361787ANov 8, 1994
Cleaning apparatus
TOKYO ELECTRON LTD19 citations74
US6652662B1Nov 25, 2003
Substrate surface processing apparatus and method
TOKYO ELECTRON LTD10 citations73
US6491760B2Dec 10, 2002
Scrub washing method
TOKYO ELECTRON LTD6 citations73
TOSOH CORP
4 patentsUS9172045B2Oct 27, 2015
4-aminocarbazole compound and use thereof
TOSOH CORP10 citations84
US9698352B2Jul 4, 2017
Amine compound and use thereof
TOSOH CORP5 citations73
US7803953B2Sep 28, 2010
Catalyst for producing arylamine and process for producing arylamine by means thereof
TOSOH CORP0 citations52
US10246393B2Apr 2, 2019
Method for producing aromatic compound
TOSOH CORP0 citations40