Inventor
MUKAI EIICHI
JP4 patents
Patents
4 patentsUS5301700AApr 12, 1994
Washing system
TOKYO ELECTRON LTD132 citations97
US5370142ADec 6, 1994
Substrate washing device
TOKYO ELECTRON LTD99 citations95
US6861371B2Mar 1, 2005
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD48 citations91
US5503171AApr 2, 1996
Substrates-washing apparatus
TOKYO ELECTRON LTD46 citations89