Inventor
KAMIKAWA YUUJI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KAMIKAWA YUUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS5301700AApr 12, 1994
Washing system
TOKYO ELECTRON LTD132 citations97
US6001191ADec 14, 1999
Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus
TOKYO ELECTRON LTD76 citations95
US5845660ADec 8, 1998
Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus
TOKYO ELECTRON LTD84 citations95
US5443540AAug 22, 1995
Apparatus and method for drying substrates
TOKYO ELECTRON LTD62 citations95
US5370142ADec 6, 1994
Substrate washing device
TOKYO ELECTRON LTD99 citations95
US5369891ADec 6, 1994
Substrate drying apparatus
TOKYO ELECTRON LTD91 citations95
US5887604AMar 30, 1999
Washing apparatus, and washing method
TOKYO ELECTRON LTD21 citations92
US5782990AJul 21, 1998
Method for washing objects
TOKYO ELECTRON LTD23 citations92
US5671764ASep 30, 1997
Washing apparatus, and washing method
TOKYO ELECTRON LTD21 citations92
US5431179AJul 11, 1995
Wafer drying apparatus and fire-extinguishing method therefor
TOKYO ELECTRON LTD21 citations91
US5253663AOct 19, 1993
Transfer apparatus
TOKYO ELECTRON LTD26 citations89