Inventor

HARDY KENNETH A

US3 patents

⚠️ This page may combine multiple inventors who share the name “HARDY KENNETH A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FORTREND ENGINEERING CORP

2 patents

US6396072B1May 28, 2002

Load port door assembly with integrated wafer mapper

FORTREND ENGINEERING CORP30 citations89

US6610993B2Aug 26, 2003

Load port door assembly with integrated wafer mapper

FORTREND ENGINEERING CORP12 citations69

FORTREND ENGINEERING COIRPORAT

1 patent

US6013920AJan 11, 2000

Wafer-mapping load post interface having an effector position sensing device

FORTREND ENGINEERING COIRPORAT611 citations93