Inventor
CLEVENGER LAWRENCE ALFRED
US7 patents
Patents
7 patentsUS5828131AOct 27, 1998
Low temperature formation of low resistivity titanium silicide
IBM60 citations94
US6444516B1Sep 3, 2002
Semi-insulating diffusion barrier for low-resistivity gate conductors
IBM31 citations92
US6448173B1Sep 10, 2002
Aluminum-based metallization exhibiting reduced electromigration and method therefor
IBM21 citations91
US5834374ANov 10, 1998
Method for controlling tensile and compressive stresses and mechanical problems in thin films on substrates
IBM30 citations89
US7923712B2Apr 12, 2011
Phase change memory element with a peripheral connection to a thin film electrode
IBM17 citations83
US6187679B1Feb 13, 2001
Low temperature formation of low resistivity titanium silicide
IBM9 citations72
US5945737AAug 31, 1999
Thin film or solder ball including a metal and an oxide, nitride, or carbide precipitate of an expandable or contractible element
IBM5 citations72