Inventor
MIRKARIMI PAUL B
US12 patents
⚠️ This page may combine multiple inventors who share the name “MIRKARIMI PAUL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
5 patentsUS6134049AOct 17, 2000
Method to adjust multilayer film stress induced deformation of optics
UNIV CALIFORNIA71 citations95
US6319635B1Nov 20, 2001
Mitigation of substrate defects in reticles using multilayer buffer layers
UNIV CALIFORNIA26 citations92
US6110607AAug 29, 2000
High reflectance-low stress Mo-Si multilayer reflective coatings
UNIV CALIFORNIA24 citations92
US6635391B2Oct 21, 2003
Method for fabricating reticles for EUV lithography without the use of a patterned absorber
UNIV CALIFORNIA9 citations73
US6309705B1Oct 30, 2001
Process for fabricating high reflectance-low stress Mo—Si multilayer reflective coatings
UNIV CALIFORNIA14 citations73
EUV LLC
4 patentsUS6821682B1Nov 23, 2004
Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography
EUV LLC61 citations95
US6967168B2Nov 22, 2005
Method to repair localized amplitude defects in a EUV lithography mask blank
EUV LLC27 citations92
US7049033B2May 23, 2006
EUV lithography reticles fabricated without the use of a patterned absorber
EUV LLC9 citations73
US7022435B2Apr 4, 2006
Method for the manufacture of phase shifting masks for EUV lithography
EUV LLC4 citations61