Inventor
MURPHEY PAUL B
US3 patents
Patents
3 patentsUS6559062B1May 6, 2003
Method for avoiding notching in a semiconductor interconnect during a metal etching step
AGERE SYSTEMS INC3 citations57
US6576563B2Jun 10, 2003
Method of manufacturing a semiconductor device employing a fluorine-based etch substantially free of hydrogen
AGERE SYSTEMS INC1 citations48
US7157375B2Jan 2, 2007
Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching
AGERE SYSTEMS INC1 citations42