Inventor
NELSON STEVEN L
US12 patents
⚠️ This page may combine multiple inventors who share the name “NELSON STEVEN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
9 patentsUS5971368AOct 26, 1999
System to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized
FSI INT INC121 citations98
US6648307B2Nov 18, 2003
Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized
FSI INT INC50 citations95
US6080531AJun 27, 2000
Organic removal process
FSI INT INC92 citations95
US6488271B1Dec 3, 2002
Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized
FSI INT INC22 citations92
US6406551B1Jun 18, 2002
Method for treating a substrate with heat sensitive agents
FSI INT INC42 citations92
US6274506B1Aug 14, 2001
Apparatus and method for dispensing processing fluid toward a substrate surface
FSI INT INC39 citations92
US6383724B1May 7, 2002
Organic removal process
FSI INT INC19 citations90
US7364625B2Apr 29, 2008
Rinsing processes and equipment
FSI INT INC31 citations88
US7312161B2Dec 25, 2007
Advanced process control for low variation treatment in immersion processing
FSI INT INC7 citations73