Inventor
THRASHER DAVID L
US11 patents
⚠️ This page may combine multiple inventors who share the name “THRASHER DAVID L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONTRAK SYSTEMS INC
9 patentsUS5475889ADec 19, 1995
Automatically adjustable brush assembly for cleaning semiconductor wafers
ONTRAK SYSTEMS INC108 citations96
US5762084AJun 9, 1998
Megasonic bath
ONTRAK SYSTEMS INC46 citations92
US5745946AMay 5, 1998
Substrate processing system
ONTRAK SYSTEMS INC68 citations92
US5727332AMar 17, 1998
Contamination control in substrate processing system
ONTRAK SYSTEMS INC44 citations91
US5975736ANov 2, 1999
Scrubber control system
ONTRAK SYSTEMS INC37 citations90
US5840129ANov 24, 1998
Hesitation free roller
ONTRAK SYSTEMS INC22 citations89
US5606251AFeb 25, 1997
Method and apparatus for detecting a substrate in a substrate processing system
ONTRAK SYSTEMS INC24 citations89
US6003185ADec 21, 1999
Hesitation free roller
ONTRAK SYSTEMS INC16 citations78
US5548505AAug 20, 1996
Scrubber control system
ONTRAK SYSTEMS INC14 citations71