Inventor

OOTA MUNEHIRO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “OOTA MUNEHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI CHEMICAL CO LTD

2 patents

US10155886B2Dec 18, 2018

Polishing liquid for CMP, and polishing method

HITACHI CHEMICAL CO LTD2 citations71

US9966269B2May 8, 2018

Polishing liquid for CMP, polishing liquid set for CMP, and polishing method

HITACHI CHEMICAL CO LTD0 citations51

SATOU EIICHI

2 patents

US9022834B2May 5, 2015

Polishing solution for CMP and polishing method using the polishing solution

SATOU EIICHI0 citations32

US8592317B2Nov 26, 2013

Polishing solution for CMP and polishing method using the polishing solution

SATOU EIICHI0 citations32

HANANO MASAYUKI

1 patent

US8853082B2Oct 7, 2014

Polishing liquid for CMP and polishing method using the same

HANANO MASAYUKI15 citations75

OOTA MUNEHIRO

1 patent

US9564337B2Feb 7, 2017

Polishing liquid and method for polishing substrate using the polishing liquid

OOTA MUNEHIRO0 citations44