Inventor
SHALMONI HADAR
IL3 patents
Patents
3 patentsUS9739702B2Aug 22, 2017
Symmetric target design in scatterometry overlay metrology
KLA TENCOR CORP31 citations92
US10591406B2Mar 17, 2020
Symmetric target design in scatterometry overlay metrology
KLA TENCOR CORP6 citations82
US9581430B2Feb 28, 2017
Phase characterization of targets
KLA TENCOR CORP15 citations82