Inventor
DEN HARTOG-BESSELINK EDWIN
NL5 patents
Patents
5 patentsUS10249524B2Apr 2, 2019
Cassette holder assembly for a substrate cassette and holding member for use in such assembly
ASM IP HOLDING BV418 citations94
US11139191B2Oct 5, 2021
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
ASM IP HOLDING BV4 citations70
US11769682B2Sep 26, 2023
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
ASM IP HOLDING BV0 citations49
US10672636B2Jun 2, 2020
Cassette holder assembly for a substrate cassette and holding member for use in such assembly
ASM IP HOLDING BV0 citations48
US12412762B2Sep 9, 2025
Semiconductor substrate processing apparatus with a temperature sensor to measure the temperature of a bearing
ASM IP HOLDING BV0 citations37