Inventor
COMENDANT KEITH LAURENCE
US3 patents
Patents
3 patentsUS9608550B2Mar 28, 2017
Lightup prevention using multi-layer ceramic fabrication techniques
LAM RES CORP2 citations63
US11942351B2Mar 26, 2024
Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns
LAM RES CORP0 citations59
US11664262B2May 30, 2023
Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns
LAM RES CORP0 citations59