Inventor
HOLLIN JONATHAN
US4 patents
⚠️ This page may combine multiple inventors who share the name “HOLLIN JONATHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS12444614B2Oct 14, 2025
Etch selectivity modulation by fluorocarbon treatment
TOKYO ELECTRON LTD0 citations54
US12512327B2Dec 30, 2025
Surface modification to achieve selective isotropic etch
TOKYO ELECTRON LTD0 citations47
US12272558B2Apr 8, 2025
Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification
TOKYO ELECTRON LTD0 citations47