Inventor
FLAUGH MATTHEW
US4 patents
Patents
4 patentsUS11715643B2Aug 1, 2023
Gas phase etch with controllable etch selectivity of metals
TOKYO ELECTRON LTD0 citations60
US11189499B2Nov 30, 2021
Atomic layer etch (ALE) of tungsten or other metal layers
TOKYO ELECTRON LTD0 citations59
US12512327B2Dec 30, 2025
Surface modification to achieve selective isotropic etch
TOKYO ELECTRON LTD0 citations47
US12272558B2Apr 8, 2025
Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification
TOKYO ELECTRON LTD0 citations47