Inventor
HIRAKI SHUN-ICHI
JP3 patents
Patents
3 patentsUS5015593AMay 14, 1991
Method of manufacturing semiconductor device
TOSHIBA KK27 citations85
US4585489AApr 29, 1986
Method of controlling lifetime of minority carriers by electron beam irradiation through semi-insulating layer
TOSHIBA KK8 citations70
US5130261AJul 14, 1992
Method of rendering the impurity concentration of a semiconductor wafer uniform
TOSHIBA KK8 citations68