Inventor
PALAGONIA ANTHONY
US4 patents
Patents
4 patentsUS5872025AFeb 16, 1999
Method for stacked three dimensional device manufacture
IBM107 citations97
US5691248ANov 25, 1997
Methods for precise definition of integrated circuit chip edges
IBM232 citations97
US5925924AJul 20, 1999
Methods for precise definition of integrated circuit chip edges
IBM83 citations95
US5651857AJul 29, 1997
Sidewall spacer using an overhang
IBM61 citations94