Inventor

CROSBY THOMAS K

US3 patents

⚠️ This page may combine multiple inventors who share the name “CROSBY THOMAS K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM IPEC CORP

1 patent

US5989104ANov 23, 1999

Workpiece carrier with monopiece pressure plate and low gimbal point

SPEEDFAM IPEC CORP54 citations94

SPEEDFAM IPEC

1 patent

US6095900AAug 1, 2000

Method for manufacturing a workpiece carrier backing pad and pressure plate for polishing semiconductor wafers

SPEEDFAM IPEC35 citations89

SPEEDFAM CORP

1 patent

US5842912ADec 1, 1998

Apparatus for conditioning polishing pads utilizing brazed diamond technology

SPEEDFAM CORP38 citations86