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Inventor
NORDELL NILS
SE
2 patents
Patents
2 patents
US5759263A
Jun 2, 1998
Device and a method for epitaxially growing objects by cvd
ABB RESEARCH LTD
25 citations
88
US5705406A
Jan 6, 1998
Method for producing a semiconductor device having semiconductor layers of SiC by the use of an ion-implantation technique
ABB RESEARCH LTD
15 citations
70