Inventor

SUGIHARA TAROU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SUGIHARA TAROU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

1 patent

US8040489B2Oct 18, 2011

Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid

NIKON CORP3 citations60

NAKANO KATSUSHI

1 patent

US8941808B2Jan 27, 2015

Immersion lithographic apparatus rinsing outer contour of substrate with immersion space

NAKANO KATSUSHI2 citations58