Inventor
TSUTSUI SHINJI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “TSUTSUI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS4561688ADec 31, 1985
Method of and apparatus for adsorbingly fixing a body
CANON KK55 citations95
US5993081ANov 30, 1999
In-line processing system
CANON KK28 citations92
US5850291ADec 15, 1998
Projection exposure apparatus and method for controlling a stage on the basis of a value corrected by ABBE error
CANON KK21 citations92
US4924258AMay 8, 1990
Mask holder and a mask conveying and holding mechanism using the same
CANON KK52 citations92
US4720732AJan 19, 1988
Pattern transfer apparatus
CANON KK56 citations92
US4564284AJan 14, 1986
Semiconductor exposure apparatus
CANON KK31 citations92
US4820930AApr 11, 1989
Photomask positioning device
CANON KK15 citations74
US5150152ASep 22, 1992
Exposure apparatus including device for determining movement of an object
CANON KK17 citations73
US4611967ASep 16, 1986
Cassette-type container for a sheet-like member
CANON KK18 citations73
US8035668B2Oct 11, 2011
Exposure apparatus and device manufacturing method
CANON KK1 citations51
US6947122B2Sep 20, 2005
Scanning exposure apparatus and method
CANON KK0 citations50