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Inventor
DEYO DAN
US
3 patents
⚠️ This page may combine multiple inventors who share the name “DEYO DAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US9668373B2
May 30, 2017
Substrate support chuck cooling for deposition chamber
APPLIED MATERIALS INC
4 citations
68
US9865489B2
Jan 9, 2018
Substrate support chuck cooling for deposition chamber
APPLIED MATERIALS INC
0 citations
48
APPLIED MAT INC
1 patent
US12597587B2
Apr 7, 2026
Process chambers having multiple cooling plates
APPLIED MAT INC
0 citations
57