Inventor
HOU David Muquing
US3 patents
Patents
3 patentsUS10187966B2Jan 22, 2019
Method and apparatus for gas abatement
APPLIED MATERIALS INC8 citations81
US10757797B2Aug 25, 2020
Method and apparatus for gas abatement
APPLIED MATERIALS INC1 citations60
US10861681B2Dec 8, 2020
Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent
APPLIED MATERIALS INC1 citations58