Inventor
FURUYA HISASHI
JP22 patents
⚠️ This page may combine multiple inventors who share the name “FURUYA HISASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI MATERIAL SILICON
12 patentsUS5871581AFeb 16, 1999
Single crystal pulling apparatus
MITSUBISHI MATERIAL SILICON34 citations92
US6663708B1Dec 16, 2003
Silicon wafer, and manufacturing method and heat treatment method of the same
MITSUBISHI MATERIAL SILICON42 citations91
US5858087AJan 12, 1999
Single crystal pulling apparatus
MITSUBISHI MATERIAL SILICON17 citations83
US6428619B1Aug 6, 2002
Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer
MITSUBISHI MATERIAL SILICON16 citations81
US5840115ANov 24, 1998
Single crystal growth method
MITSUBISHI MATERIAL SILICON8 citations73
US5779792AJul 14, 1998
Single crystal pulling apparatus
MITSUBISHI MATERIAL SILICON10 citations73
US6379460B1Apr 30, 2002
Thermal shield device and crystal-pulling apparatus using the same
MITSUBISHI MATERIAL SILICON12 citations72
US6682597B2Jan 27, 2004
Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer
MITSUBISHI MATERIAL SILICON7 citations70
US5895527AApr 20, 1999
Single crystal pulling apparatus
MITSUBISHI MATERIAL SILICON6 citations62
US5843228ADec 1, 1998
Apparatus for preventing heater electrode meltdown in single crystal pulling apparatus
MITSUBISHI MATERIAL SILICON4 citations61
US5897706AApr 27, 1999
Methods for crucible attachment to support base of single crystal pulling apparatus and support base assembly apparatus and support base employed therein
MITSUBISHI MATERIAL SILICON3 citations60
US5873938AFeb 23, 1999
Single crystal pulling apparatus
MITSUBISHI MATERIAL SILICON0 citations51