Inventor
TELFORD SUSAN G
DE5 patents
Patents
5 patentsUS5500249AMar 19, 1996
Uniform tungsten silicide films produced by chemical vapor deposition
APPLIED MATERIALS INC267 citations97
US5643633AJul 1, 1997
Uniform tungsten silicide films produced by chemical vapor depostiton
APPLIED MATERIALS INC75 citations94
US5997950ADec 7, 1999
Substrate having uniform tungsten silicide film and method of manufacture
APPLIED MATERIALS INC29 citations91
US5558910ASep 24, 1996
Uniform tungsten silicide films produced by chemical vapor deposition
APPLIED MATERIALS INC24 citations91
US6242111B1Jun 5, 2001
Anodized aluminum susceptor for forming integrated circuit structures and method of making anodized aluminum susceptor
APPLIED MATERIALS INC20 citations90