Inventor
SU JINGANG
US9 patents
⚠️ This page may combine multiple inventors who share the name “SU JINGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6110836AAug 29, 2000
Reactive plasma etch cleaning of high aspect ratio openings
APPLIED MATERIALS INC257 citations98
US6313042B1Nov 6, 2001
Cleaning contact with successive fluorine and hydrogen plasmas
APPLIED MATERIALS INC56 citations94
US6149784ANov 21, 2000
Sputtering chamber shield promoting reliable plasma ignition
APPLIED MATERIALS INC66 citations93
US6383915B1May 7, 2002
Tailoring of a wetting/barrier layer to reduce electromigration in an aluminum interconnect
APPLIED MATERIALS INC8 citations71
INTERMOLECULAR INC
4 patentsUS8945414B1Feb 3, 2015
Oxide removal by remote plasma treatment with fluorine and oxygen radicals
INTERMOLECULAR INC93 citations94
US9337030B2May 10, 2016
Method to grow in-situ crystalline IGZO using co-sputtering targets
INTERMOLECULAR INC3 citations71
US9297775B2Mar 29, 2016
Combinatorial screening of metallic diffusion barriers
INTERMOLECULAR INC1 citations51
US9023438B2May 5, 2015
Methods and apparatus for combinatorial PECVD or PEALD
INTERMOLECULAR INC0 citations41