Inventor
MCWAID THOMAS
US5 patents
Patents
5 patentsUS5955661ASep 21, 1999
Optical profilometer combined with stylus probe measurement device
KLA TENCOR CORP125 citations97
US5852232ADec 22, 1998
Acoustic sensor as proximity detector
KLA TENCOR CORP180 citations96
US6520005B2Feb 18, 2003
System for sensing a sample
KLA TENCOR CORP19 citations91
US7278301B2Oct 9, 2007
System for sensing a sample
KLA TENCOR CORP2 citations61
US6931917B2Aug 23, 2005
System for sensing a sample
KLA TENCOR CORP1 citations61