Inventor

KNEPFLER CHERYL

US2 patents

Patents

2 patents

US7745333B2Jun 29, 2010

Methods for depositing tungsten layers employing atomic layer deposition techniques

APPLIED MATERIALS INC47 citations97

US7405158B2Jul 29, 2008

Methods for depositing tungsten layers employing atomic layer deposition techniques

APPLIED MATERIALS INC105 citations96