Inventor

KAMINATSUI TAKESHI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KAMINATSUI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

1 patent

US10388544B2Aug 20, 2019

Substrate processing apparatus and substrate processing method

TOSHIBA KK45 citations93

UI AKIO

1 patent

US8821684B2Sep 2, 2014

Substrate plasma processing apparatus and plasma processing method

UI AKIO52 citations92