Inventor
SEVILLA ROLAND K
US5 patents
⚠️ This page may combine multiple inventors who share the name “SEVILLA ROLAND K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
3 patentsUS6884156B2Apr 26, 2005
Multi-layer polishing pad material for CMP
CABOT MICROELECTRONICS CORP77 citations97
US6840843B2Jan 11, 2005
Method for manufacturing a polishing pad having a compressed translucent region
CABOT MICROELECTRONICS CORP37 citations91
US6623331B2Sep 23, 2003
Polishing disk with end-point detection port
CABOT MICROELECTRONICS CORP21 citations90