Inventor
KAUFMAN FRANK B
US12 patents
⚠️ This page may combine multiple inventors who share the name “KAUFMAN FRANK B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS4954142ASep 4, 1990
Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor
IBM330 citations98
US4702792AOct 27, 1987
Method of forming fine conductive lines, patterns and connectors
IBM120 citations95
US6632377B1Oct 14, 2003
Chemical-mechanical planarization of metallurgy
IBM70 citations94
US4142783AMar 6, 1979
Reversible electrochromic display device having memory
IBM46 citations92
US4155866AMay 22, 1979
Method of controlling silicon wafer etching rates-utilizing a diazine catalyzed etchant
IBM28 citations81
US4360583ANov 23, 1982
High resolution video storage disk
IBM7 citations71
US4543319ASep 24, 1985
Polystyrene-tetrathiafulvalene polymers as deep-ultraviolet mask material
IBM14 citations68