Inventor
ANJUR SRIRAM P
US7 patents
⚠️ This page may combine multiple inventors who share the name “ANJUR SRIRAM P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT CORP
3 patentsCABOT MICROELECTRONICS CORP
3 patentsUS6685540B2Feb 3, 2004
Polishing pad comprising particles with a solid core and polymeric shell
CABOT MICROELECTRONICS CORP35 citations92
US7585340B2Sep 8, 2009
Polishing composition containing polyether amine
CABOT MICROELECTRONICS CORP19 citations91
US7438795B2Oct 21, 2008
Electrochemical-mechanical polishing system
CABOT MICROELECTRONICS CORP17 citations82