Inventor

Shang hui-ling

TW2 patents

Patents

2 patents

US11075283B2Jul 27, 2021

Dielectric constant reduction of gate spacer

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67

US12453154B2Oct 21, 2025

Dielectric constant reduction of gate spacer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56